DUST-FREE AND PORE-FREE, HIGH PURITY POLYCRYSTALLINE GRANULATED SILICON, ITS PRODUCTION PROCESS AND ITS USE
PROBLEM TO BE SOLVED: To provide a polycrystalline granulated silicon which does not have the drawbacks of the known granulated polysilicon. SOLUTION: The polycrystalline granulated silicon is made of particles which have a density of greater than 99.9% of the theoretical solid density and therefore...
Saved in:
Main Authors | , , |
---|---|
Format | Patent |
Language | English |
Published |
07.07.2005
|
Edition | 7 |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | PROBLEM TO BE SOLVED: To provide a polycrystalline granulated silicon which does not have the drawbacks of the known granulated polysilicon. SOLUTION: The polycrystalline granulated silicon is made of particles which have a density of greater than 99.9% of the theoretical solid density and therefore have a pore content of less than 0.1% and have a surface roughness Raof less than 150 nm. COPYRIGHT: (C)2005,JPO&NCIPI |
---|---|
Bibliography: | Application Number: JP20040364959 |