SCANNING ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To provide an image processing method capable of reducing slimming of a sample, and of providing optimum image quality having high visibility, in a scanning electron microscope. SOLUTION: Slimming is reduced by reducing a frame cumulative number. Since a secondary electron dete...

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Bibliographic Details
Main Authors FUJITA SHINJI, KAWADA HIROKI, IWAMA SATORU
Format Patent
LanguageEnglish
Published 30.06.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
GAMMA RAY OR X-RAY MICROSCOPES
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
IRRADIATION DEVICES
MEASURING
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide an image processing method capable of reducing slimming of a sample, and of providing optimum image quality having high visibility, in a scanning electron microscope. SOLUTION: Slimming is reduced by reducing a frame cumulative number. Since a secondary electron detection amount is reduced when the frame cumulative is reduced, the secondary electron detection amount is increased by increasing the amount of a probe current. A histogram is created by executing electron beam scanning (S12), and the histogram is secondarily differentiated (S13) to calculate gradation where contrast of a sample image changes and the amount of a probe current (S16). By adjusting the cumulative frame number suitable for the calculated amount of the probe current and the contrast suitable for the sample image (S17), slimming of the sample is suppressed, and the optimum sample image having high visibility is obtained to measure length (S18). COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20030407984