CUP TYPE SUPER-ABRASIVE GRAIN WHEEL FOR PROCESSING MIRROR SURFACE

• Main Authors: TANAKA HIROSHI, YAMAZAKI SHIGEKAZU, KADOMURA KAZUNORI
• Format: Patent
• Language: English
• Published: 23.06.2005
• Edition: 7
• Subjects: GRINDING; PERFORMING OPERATIONS; POLISHING; TOOLS FOR GRINDING, BUFFING, OR SHARPENING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a super-abrasive grain wheel for processing a mirror surface, restraining generation of a recessed part in a wafer central part, by improving flatness of the whole processing surface, by improving grinding performance, when performing mirror surface grinding processing. SOLUTION: This cup type vitrified bond super-abrasive grain wheel is formed by arranging a plurality of super-abrasive grain layers on base metal. The super-abrasive grain wheel is characterized in that: the super-abrasive grain layers are arranged in an annular shape composed of straight lines of an angle symmetrical on both sides; a maximum angle in the radial direction of a base of a tangent in a curve formed on the base metal, is set to 30° to 90°on an angle opening to the outer peripheral side of the base; and a maximum angle is set to 10° to 45° on an angle opening the the inner peripheral side of the base. The wheel is characterized in that: a groove is formed on the respective straight lines for constituting the annular abrasive grain layers; and the groove formed on at least the adjacent straight lines, is made different in a radial position of the super-abrasive grain wheel. COPYRIGHT: (C)2005,JPO&NCIPI