GLASS SUBSTRATE FOR DISPLAY, MANUFACTURING METHOD OF THE SAME, AND PLASMA DISPLAY PANEL

• Main Authors: JIBIKI SATOSHI, AIDA TAKUJI
• Format: Patent
• Language: English
• Published: 26.05.2005
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To solve the problem of the lifting up or exfoliation of the end parts of electrodes at the alcaline cleaning caused by insufficiency in the resistance to alkali chemical of the part exposed at an inter-electrode insulation part, as in the case of electrode processing, in which laser beam is irradiated on a transparent conductive film of tin oxide to make a transparent conductive film completely evaporated and disappeared. SOLUTION: When forming the part excluding a transparent electrode which is a part of zinc oxide transparent conductive film covering the glass plate into an inter-electrode insulation part, the inter-electrode insulation part is processed to evaporate and remove a surface layer of the zinc oxide transparent conductive film by irradiation of the laser beam, and to electrically insulate the inner layer under the surface layer through oxidation. It is preferable to control the energy density of the irradiated laser beam to within 8 to 14J/cm2, and to form the insulation film of the inner layer obtained by the heating oxidation with a thickness of 5 to 15 nm. COPYRIGHT: (C)2005,JPO&NCIPI