MANUFACTURING METHOD OF COLD CATHODE FIELD ELECTRON EMISSION DISPLAY DEVICE

• Main Author: ASANO TAKEYOSHI
• Format: Patent
• Language: English
• Published: 28.04.2005
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

PROBLEM TO BE SOLVED: To provide a production method of a cold cathode field electron emission display device in which the accurate and inexpensive formation of an emitter is enabled without employing a positioning device, and in which the quality deterioration of an emitter material is prevented when forming the emitter in a gate hole by an after insertion process of the emitter. SOLUTION: This manufacturing method of the cold cathode field electron emission display device has a process of forming a first electrode 2 which becomes a cathode on a substrate 1, a process of forming a second electrode 4 which becomes a gate electrode via an insulating layer 3 so that it intersects with the first electrode 2, a forming process of an aperture 5 which the first electrode 2 faces on the insulating layer 3 and the second electrode 4 at a crossing position, a film-forming process of an emitter 6 on the inner face of the aperture 5 and on the second electrode 4, a process to selectively form a photoresist layer on the emitter 6 of the bottom face of the aperture 5 and to remove the emitter 6 by etching other than the emitter 6 protected by the photoresist layer of the aperture 5, and a process to form the required emitter 6 by removing the photoresist layer in the aperture 5. COPYRIGHT: (C)2005,JPO&NCIPI