PROBE UNIT

PROBLEM TO BE SOLVED: To provide a probe unit capable of testing and measuring a wafer with a probe card always in a constant contact state with the wafer, by instantly detecting a positional change of the probe card and then correcting the position of the same even in a high or low temperature envi...

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Bibliographic Details
Main Authors NIHEI MAKOTO, UEDA YUTAKA
Format Patent
LanguageEnglish
Published 17.03.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a probe unit capable of testing and measuring a wafer with a probe card always in a constant contact state with the wafer, by instantly detecting a positional change of the probe card and then correcting the position of the same even in a high or low temperature environment. SOLUTION: The probe unit comprises a displacement detecting means 6 attached to the face 4a of the probe card 4 whereon a probe pin 41 projects, and a control means 5 which receives signals indicating the positional change of the probe card or a positional change of a stage side, or positional changes of both from the displacement detecting means and then moves the stage 2 in a Z-axis direction. The positional change of the probe card 4 due to heat or the like is sensed in real time by the displacement detecting means, and then the stage is moved to correct the positional change so that a state of contact is kept constant between the probe pin of the probe card and an electrode pad of the wafer 10. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20030297630