TURBO VACUUM PUMP AND SEMICONDUCTOR MANUFACTURING DEVICE HAVING THIS TURBO VACUUM PUMP

PROBLEM TO BE SOLVED: To provide a turbo vacuum pump continuously operable over a long period, and capable of reducing the size and weight by rotating at a high speed, by imparting characteristics of anti-corrosiveness, a low thermal expansion coefficient, high strength, a high Young's modulus,...

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Bibliographic Details
Main Authors OGAMINO HIROAKI, SEKIGUCHI SHINICHI
Format Patent
LanguageEnglish
Published 17.03.2005
Edition7
Subjects
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To provide a turbo vacuum pump continuously operable over a long period, and capable of reducing the size and weight by rotating at a high speed, by imparting characteristics of anti-corrosiveness, a low thermal expansion coefficient, high strength, a high Young's modulus, and ferromagnetism to a rotary shaft, in the turbo vacuum pump for exhausting gas having anti-corrosiveness and gas including a reaction product. SOLUTION: In this turbo vacuum pump, a pump part composed of a moving blade and a stationary blade is arranged in a casing 21 provided with an intake port, and a bearing and a motor for rotatably supporting the moving blade are arranged on the shaft directional one side of the pump part. The rotary shaft has at least one shaft fastening part, and has a first rotary shaft 28 for installing the moving blade and a second rotary shaft 34 for installing at least a rotor of the motor. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20030297843