DRIVE DEVICE AND OPTICAL DEVICE
PROBLEM TO BE SOLVED: To provide a small and highly yielding drive device and optical device. SOLUTION: This drive device is arranged in a first layer and a second layer overlapped on a first layer through an intermediate and has a drive part having a fixed electrode and a movable electrode arranged...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
17.03.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a small and highly yielding drive device and optical device. SOLUTION: This drive device is arranged in a first layer and a second layer overlapped on a first layer through an intermediate and has a drive part having a fixed electrode and a movable electrode arranged in the first layer and meshing with each other, a movable plate arranged in the second layer and a flexible supporting part connected to the movable electrode and the movable plate. COPYRIGHT: (C)2005,JPO&NCIPI |
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Bibliography: | Application Number: JP20030303443 |