DRIVE DEVICE AND OPTICAL DEVICE

PROBLEM TO BE SOLVED: To provide a small and highly yielding drive device and optical device. SOLUTION: This drive device is arranged in a first layer and a second layer overlapped on a first layer through an intermediate and has a drive part having a fixed electrode and a movable electrode arranged...

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Bibliographic Details
Main Authors HARADA HIROSHI, FUKUSHIMA HIROSHI, NOGE HIROSHI, OKA NAOMASA, OGIWARA ATSUSHI, KONO KIYOHIKO, SUZUKI YUJI
Format Patent
LanguageEnglish
Published 17.03.2005
Edition7
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a small and highly yielding drive device and optical device. SOLUTION: This drive device is arranged in a first layer and a second layer overlapped on a first layer through an intermediate and has a drive part having a fixed electrode and a movable electrode arranged in the first layer and meshing with each other, a movable plate arranged in the second layer and a flexible supporting part connected to the movable electrode and the movable plate. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20030303443