SLURRY FEEDER

PROBLEM TO BE SOLVED: To provide a slurry feeder forming no stagnation of abrasive grains at a corner part or a bottom part of a tank. SOLUTION: This slurry feeder is constituted to store slurry in cylindrical buffer tanks 20, 22, to connect feed piping 20a, 22a to the bottom part, to connect return...

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Bibliographic Details
Main Authors IWAMOTO KAZUYOSHI, OGAWARA YOSHIO
Format Patent
LanguageEnglish
Published 17.03.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a slurry feeder forming no stagnation of abrasive grains at a corner part or a bottom part of a tank. SOLUTION: This slurry feeder is constituted to store slurry in cylindrical buffer tanks 20, 22, to connect feed piping 20a, 22a to the bottom part, to connect return piping 20b, 22f to the upper part and to close the upper part. A return passage tip part 50 discharges slurry into the buffer tanks 20, 22 along the internal wall of the buffer tanks 20, 22. Agitating mechanisms 54 are provided near the bottom parts in the buffer tanks 20, 22 and near connection parts of the feed piping 20a, 22a to agitate slurry. A feed pump 36 is connected to the feed piping 20a, 22a to feed slurry to the outside of the slurry feeder and forms the vortex of slurry in the buffer tanks 20, 22. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20030298086