ELECTRICALLY-CHARGED PARTICLE RADIATION SOURCE

• Main Authors: TERUI YOSHINORI, MORISHITA TOSHIYUKI, SAKAWA MORIKAZU
• Format: Patent
• Language: English
• Published: 10.03.2005
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide an electrically-charged particle radiation source, capable of reducing the positional deviation of a carbon heater or a chip caused by the generation of a force or a displacement on struts when it is mounted on an electron beam utilization device, or the like, by a change in a contact resistance between the chip and the struts associated therewith, and by a change in an electromagnetic radiation resulting from the foregoing reasons. SOLUTION: A structure comprises a substance having electrically-charged particles radioactivity, an insulator, a pair of struts for grasping the substance having electrically-charged particles radioactivity and fixing it to the insulator, and a pair of terminals for supplying an electric current through the substance having electrically-charged particles radioactivity via the struts. The struts and the terminals are electrically connected via a metal wire or a metal foil, and preferably, the insulator has a step around the insulator, and more preferably, the substance having electrically-charged particles radioactivity is made up of single crystals of hexaborides of rare earth elements. COPYRIGHT: (C)2005,JPO&NCIPI