METHOD FOR MANUFACTURING FINE PARTICLE AND MANUFACTURING APPARATUS FOR FINE PARTICLE

PROBLEM TO BE SOLVED: To provide a method for manufacturing fine particles and a manufacturing apparatus for the fine particles by which fine particles such as carbon nanotubes and nanocapsules can be synthesized in a large amount without increasing the scale of the manufacturing apparatus by using...

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Bibliographic Details
Main Authors TANAKA YOSHIHISA, HAYASHI YASUAKI, TAKADA FUJIO
Format Patent
LanguageEnglish
Published 10.03.2005
Edition7
Subjects
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
THEIR RELEVANT APPARATUS
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a method for manufacturing fine particles and a manufacturing apparatus for the fine particles by which fine particles such as carbon nanotubes and nanocapsules can be synthesized in a large amount without increasing the scale of the manufacturing apparatus by using a thermal CVD method and a P-CVD (plasma chemical vapor deposition) method. SOLUTION: The manufacturing apparatus is equipped with a vacuum chamber 2, a gas inlet system to introduce a source gas into the vacuum chamber 2, a heat filaments 19 to heat a reactive gas containing the source gas supplied by the gas inlet system, and a particle collecting section 22 to collect the produced carbon fine particles. Carbon fine particles are produced and collected by decomposing the reactive gas in the vacuum chamber 2 charged with a gas containing the reactive gas. Further, glow discharge plasma is generated near the heat filaments 19 by a plasma generating means. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20030181879