CERAMICS HEATER OF ALUMINUM NITRIDE

• Main Authors: MURAMATSU SHIGEKO, OISHI KOJI, AONUMA SHINICHIRO
• Format: Patent
• Language: English
• Published: 20.01.2005
• Edition: 7
• Subjects: ARTIFICIAL STONE; CEMENTS; CERAMICS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIME, MAGNESIA; METALLURGY; REFRACTORIES; SLAG; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TREATMENT OF NATURAL STONE

PROBLEM TO BE SOLVED: To obtain a ceramics heater for preventing occurring of a defect at a liquid-phase, restraining a reduction in electric resistance of a sintered compact, and uniformizing a temperature distribution on an inner face of a heater in a manner that tungsten, molybdenum or platinum does not react with a liquid phase component or a sintering auxiliary agent during sintering by forming an oxide film on the surface of tungsten or molybdenum being a heating element of the heater. SOLUTION: The heater comprises a heater cover of an aluminum nitride having a heating surface; a heater base of the aluminum nitride integrally joined with the heating surface of the cover on an opposed side; a resistive heating element embedded and disposed into either of the cover or the base and therebetween; and a power supply terminal of which one end is connected to the resistive heating element. The resistive heating element is made of any one kind of metals or metal compounds among tungsten, molybdenum or platinum, and the surface of the resistive heating element is coated with the oxide film. COPYRIGHT: (C)2005,JPO&NCIPI