METHOD OF MANUFACTURING ARTICLE WITH FINE SURFACE STRUCTURE, AND DIE AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To easily increase the height of a three-dimensional structure. SOLUTION: A mold-releasing treated recessed die 20a is set on the lower side, and acrylic resin is applied thereon as ultraviolet curing resin 30. A projecting substrate 10a of a prestructural material subjected to...

Full description

Saved in:
Bibliographic Details
Main Author UMEKI KAZUHIRO
Format Patent
LanguageEnglish
Published 24.12.2004
Edition7
Subjects
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:PROBLEM TO BE SOLVED: To easily increase the height of a three-dimensional structure. SOLUTION: A mold-releasing treated recessed die 20a is set on the lower side, and acrylic resin is applied thereon as ultraviolet curing resin 30. A projecting substrate 10a of a prestructural material subjected to silane coupling treatment beforehand in another process is pressed thereon, and the ultraviolet curing resin 30 which becomes excessive in shape transfer is removed from a substrate peripheral part. The ultraviolet curing resin layer 30 is cured by irradiating uniform ultraviolet rays, and after separating the die 20a, the transfer shape of the resin 30 is transferred to a quartz material 10a by a dry etching method to acquire a final product. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20030156094