SEMICONDUCTOR DEVICE MANUFACTURING PROCESS CONTROL SYSTEM, AND METHOD AND PROGRAM FOR CONTROLLING SEMICONDUCTOR DEVICE MANUFACTURING PROCESS

• Main Authors: ISHIMOTO SATOSHI, TSUBAKIDA OSAMU, ASHIZAWA YOSHIO
• Format: Patent
• Language: English
• Published: 09.12.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To incorporate a manufacturing process control system to an existing system without adding any large-scale modification. SOLUTION: An APC system 10 for controlling semiconductor device manufacturing processes collects the manufacturing data of a semiconductor device by inquirin...