SEMICONDUCTOR DEVICE MANUFACTURING PROCESS CONTROL SYSTEM, AND METHOD AND PROGRAM FOR CONTROLLING SEMICONDUCTOR DEVICE MANUFACTURING PROCESS

PROBLEM TO BE SOLVED: To incorporate a manufacturing process control system to an existing system without adding any large-scale modification. SOLUTION: An APC system 10 for controlling semiconductor device manufacturing processes collects the manufacturing data of a semiconductor device by inquirin...

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Bibliographic Details
Main Authors ISHIMOTO SATOSHI, TSUBAKIDA OSAMU, ASHIZAWA YOSHIO
Format Patent
LanguageEnglish
Published 09.12.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To incorporate a manufacturing process control system to an existing system without adding any large-scale modification. SOLUTION: An APC system 10 for controlling semiconductor device manufacturing processes collects the manufacturing data of a semiconductor device by inquiring the data to an MES/CC system 20 that manages the manufacturing, applies a filtering process to the collected manufacturing data, and using the filtered data and a specific algorithm, generates a recipe for controlling the process of a semiconductor manufacturing apparatus. As such, since the APC system 10 initiatively collects the manufacturing data, the MES/CC system 20 does not require any large-scale modification in incorporating the APC system 10 to the semiconductor manufacturing system 1. COPYRIGHT: (C)2005,JPO&NCIPI
Bibliography:Application Number: JP20030148039