IN-VACUUM DEVICE FOR DRIVE AND SUBSTRATE CONVEYING APPARATUS USING SAME

• Main Authors: FUJII TAKAO, TOMINAGA RYUICHIRO
• Format: Patent
• Language: English
• Published: 30.09.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DYNAMO-ELECTRIC MACHINES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide an in-vacuum device for drive with simple configuration wherein the lead wires, signal wires, or the like of motors need not be routed in a vacuum chamber, and thus particles are not produced and to provide a substrate conveying apparatus using this driving device. S...