IN-VACUUM DEVICE FOR DRIVE AND SUBSTRATE CONVEYING APPARATUS USING SAME

• Main Authors: FUJII TAKAO, TOMINAGA RYUICHIRO
• Format: Patent
• Language: English
• Published: 30.09.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DYNAMO-ELECTRIC MACHINES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide an in-vacuum device for drive with simple configuration wherein the lead wires, signal wires, or the like of motors need not be routed in a vacuum chamber, and thus particles are not produced and to provide a substrate conveying apparatus using this driving device. SOLUTION: A first mover 8 and a second moving member 11 are movably disposed on the atmosphere side and on the vacuum side of a wall face 5 of the vacuum chamber, respectively. An armature 3 is disposed on the atmosphere side with a magnetic gap between the armature and the second moving member 11. The first mover 8 is provided with an encoder 12 and 13 for detecting the position of the first mover 8 in the direction of movement, relative to the vacuum chamber. A magnetic sensor 4 is provided for detecting the phase shift between the first moving member 8 and the second moving member 11, and control is carried out so that the second mover 11 will be driven without phase shift between the second moving member and the first moving member 8. Only the second moving member 11 and bearings are placed in the vacuum chamber, and the armature having the lead wires, a phase difference detecting means and the encoder involving wiring are disposed outside the vacuum chamber. Therefore, particles produced in the vacuum chamber are reduced, significantly. COPYRIGHT: (C)2004,JPO&NCIPI