QUALITY CONTROL METHOD OF ELECTRONIC COMPONENT MATERIAL

PROBLEM TO BE SOLVED: To provide accurate and quick quality control method relative to a trace metal element intermingled in an electronic component material. SOLUTION: Quality control of the electronic component material is performed by using an analytical method for detecting an isotope abundance...

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Bibliographic Details
Main Authors YABUKI MOTOO, TAKENAKA MIYUKI, TATEBE TETSUYA
Format Patent
LanguageEnglish
Published 30.09.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide accurate and quick quality control method relative to a trace metal element intermingled in an electronic component material. SOLUTION: Quality control of the electronic component material is performed by using an analytical method for detecting an isotope abundance ratio of a specific metal element by using a mass spectrometer relative to a sample collected from the electronic component material. In a manufacturing process of an electronic component, the sample is collected periodically or non-periodically from the electronic component material to be used, and the isotope abundance ratio of the specific metal element is detected by using the mass spectrometer relative to each sample, and fluctuation of the isotope abundance ratio is monitored. COPYRIGHT: (C)2004,JPO&NCIPI
Bibliography:Application Number: JP20030058748