SUBSTRATE FOR CALIBRATION

PROBLEM TO BE SOLVED: To provide a substrate for calibration which can be shared even when measurement points are different. SOLUTION: The substrate for calibration is for calibrating a size measuring device measuring an interval between two measurement points based on respective pickup images of tw...

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Bibliographic Details
Main Authors YAMAMOTO SHUSUKE, SOEDA MASAHIKO
Format Patent
LanguageEnglish
Published 15.07.2004
Edition7
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a substrate for calibration which can be shared even when measurement points are different. SOLUTION: The substrate for calibration is for calibrating a size measuring device measuring an interval between two measurement points based on respective pickup images of two cameras for measurement arranged so as to pick up images of the two measurement points, and it is characterized by that a grid pattern is formed in a range including a maximum value of the interval. COPYRIGHT: (C)2004,JPO&NCIPI
Bibliography:Application Number: JP20020363181