FLUID CONTROL DEVICE

PROBLEM TO BE SOLVED: To provide a fluid control device improved in its repairing performance and stably and instantaneously switching the kind of gas without accompanying the variation of pressure. SOLUTION: A main body 2 is composed of a central passage block 11 and side passage blocks 12, 13. Eac...

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Bibliographic Details
Main Authors MAKINO MEGUMI, MOCHIZUKI SEITETSU, KOGAI MUTSUNORI
Format Patent
LanguageEnglish
Published 02.07.2004
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To provide a fluid control device improved in its repairing performance and stably and instantaneously switching the kind of gas without accompanying the variation of pressure. SOLUTION: A main body 2 is composed of a central passage block 11 and side passage blocks 12, 13. Each of switching valves 5, 6 is detachably mounted over the central passage block and one of the side passage blocks. Y-shaped passages 22 composed of one common passage 22a and two branch passages 22b, 22c are formed by the number same as the number of sub-gas inlets 23. An opening of the common passage 22a of the Y-shaped passage 22 is applied as the sub-gas inlet 23, and the branch passages 22b, 22c of the Y-shaped passage 22 are respectively communicated to inlet ports of the switch valves 5, 6 to form the sub-gas flowing-in passage. A main gas passage 18 and a main passage-side communication passage 19 are formed on one of the side passage block 12, and a vent gas passage 20 and a vent passage side communication passage 21 are formed on the other side passage block 13. COPYRIGHT: (C)2004,JPO&NCIPI
Bibliography:Application Number: JP20020349850