STATIC PRESSURE GAS BEARING
PROBLEM TO BE SOLVED: To provide a static pressure gas bearing having excellent vibration damping characteristics. SOLUTION: The orifice type static pressure gas bearing is provided with a ventilation groove communicating with a gas jetting outlet. When a bearing clearance is taken as h and depth of...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
20.05.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a static pressure gas bearing having excellent vibration damping characteristics. SOLUTION: The orifice type static pressure gas bearing is provided with a ventilation groove communicating with a gas jetting outlet. When a bearing clearance is taken as h and depth of the ventilation grove is taken as g, h is 5μm or less and g/h is 5 or more. Materials of a guide, a slider and an orifice which are made up of the bearing are alumina, silicon carbide, silicon nitride, sialon, cordierite, or composite ceramic predominantly composed of them. Therefore, this invention can be effectively materialized. COPYRIGHT: (C)2004,JPO |
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Bibliography: | Application Number: JP20020309354 |