DESIGN OF LITHOGRAPHY MASK AND SYNTHESIS OF VARIOUS PROBE ON SUBSTRATE

• Main Authors: HUBBELL EARL A, STRYER LUBERT, MITTMAN MICHAEL P
• Format: Patent
• Language: English
• Published: 20.05.2004
• Edition: 7
• Subjects: APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS SPECIALLY ADAPTED THEREFOR; APPARATUS THEREFOR; BEER; BIOCHEMISTRY; CALCULATING; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMISTRY; CINEMATOGRAPHY; COMBINATORIAL CHEMISTRY; COMPOSITIONS OR TEST PAPERS THEREFOR; COMPOSITIONS THEREOF; COMPUTING; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL ORENZYMOLOGICAL PROCESSES; COUNTING; CULTURE MEDIA; ELECTRIC DIGITAL DATA PROCESSING; ELECTROGRAPHY; ENZYMOLOGY; GENERAL METHODS OF ORGANIC CHEMISTRY; HOLOGRAPHY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; LIBRARIES, e.g. CHEMICAL LIBRARIES, IN SILICOLIBRARIES; MATERIALS THEREFOR; MEASURING; MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEICACIDS OR MICROORGANISMS; METALLURGY; MICROBIOLOGY; MICROORGANISMS OR ENZYMES; MUTATION OR GENETIC ENGINEERING; ORGANIC CHEMISTRY; ORIGINALS THEREFOR; PEPTIDES; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PHYSICS; PROCESSES OF PREPARING SUCH COMPOSITIONS; PROPAGATING, PRESERVING OR MAINTAINING MICROORGANISMS; SPIRITS; TESTING; THEIR RELEVANT APPARATUS; TRANSPORTING; VINEGAR; WINE

PROBLEM TO BE SOLVED: To provide a computer system for forming a mask, more precisely, provide a system for forming a probe on a substrate by generating the mask and using the same, and a method therefor. SOLUTION: The system and the method for synthesizing the probe on the substrate are provided. A monomer is uniformly added to a predetermined spot of the substrate by using one or more shift reticles. The shift reticles are shifted to the substrate between stages of adding the monomer. Further, characteristics of a predetermined probe can be specified in synthesizing the probe. COPYRIGHT: (C)2004,JPO