OPTICAL DEVICE

PROBLEM TO BE SOLVED: To provide an optical device which is configured so as to prevent an optical element from deforming and deterioration in optical characteristic accompanying it. SOLUTION: A VIPA optical element 10 which is provided with a multilayer reflecting film 11 and a multilayer antirefle...

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Bibliographic Details
Main Authors MITAMURA NOBUAKI, SONODA HIROHIKO, YAMAZAKI YUJIN, KAWABATA YUICHI
Format Patent
LanguageEnglish
Published 15.04.2004
Edition7
Subjects
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TRANSMISSION
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Summary:PROBLEM TO BE SOLVED: To provide an optical device which is configured so as to prevent an optical element from deforming and deterioration in optical characteristic accompanying it. SOLUTION: A VIPA optical element 10 which is provided with a multilayer reflecting film 11 and a multilayer antireflective film 12 on one surface and with a translucent multilayer reflecting film 14 on the other surface is provided with a stress correcting film 16 to adjust imbalance of stress between multilayer films on both the surfaces. By providing the stress correcting film 16, the imbalance of stress between both the surfaces of the VIPA optical element 10 is corrected to form the VIPA optical element 10 with good surface precision. COPYRIGHT: (C)2004,JPO
Bibliography:Application Number: JP20020279989