SUBSTRATE PROCESSING SYSTEM

PROBLEM TO BE SOLVED: To provide a substrate processing system including a drive control system capable of detecting interference and collision with high accuracy and preventing occurrence of an accident such as collision in advance without being affected by vibration or the like of a carrying mecha...

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Bibliographic Details
Main Authors TATENO HIDETO, MAEDA HIDEHIKO, HAYASHI AKINARI
Format Patent
LanguageEnglish
Published 02.04.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS
CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a substrate processing system including a drive control system capable of detecting interference and collision with high accuracy and preventing occurrence of an accident such as collision in advance without being affected by vibration or the like of a carrying mechanism. SOLUTION: In the substrate processing system provided with the carrying mechanism 15 and the drive control system 24 for the carrying mechanism, the drive control system includes: a load torque detection section 31 for detecting a load torque of a motor 22 of the carrying mechanism; and a torque limit value generating section 27 for outputting a torque limit value obtained on the basis of the load torque of the motor in a normal operation, and is configured to emergently stop the motor when the load torque of the motor exceeds the torque limit value. COPYRIGHT: (C)2004,JPO
Bibliography:Application Number: JP20020266998