PIEZOELECTRIC VIBRATION TYPE GAS SENSOR

• Main Author: MIYAZAKI SHIGEYUKI
• Format: Patent
• Language: English
• Published: 02.04.2004
• Edition: 7
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To further improve the detection precision of a piezoelectric vibration type gas sensor for detecting the combined state of a gas constituent with a receptor such as a sensitive film by a change in the frequency of a piezoelectric vibrator by considering the change in the frequency of the piezoelectric vibrator by a temperature change. SOLUTION: An oscillation circuit 106 is connected to platinum electrodes 102, 104 in the piezoelectric vibration type gas sensor, and a frequency counter 107 is connected to the oscillation circuit 106, and the resonance frequency of a quartz plate 101 can be measured. Additionally, a resistance measuring instrument 108 is connected to the platinum electrode film 102 in the piezoelectric vibration type gas sensor to measure a temperature change in the platinum electrode film 102. An analysis processing section 109 analyzes gas to be measured in an atmosphere where the piezoelectric vibration type gas sensor is arranged according to a change in the inputted resonance frequency and a change in resistance. COPYRIGHT: (C)2004,JPO