ELECTROSTATIC ACTUATOR, LIQUID DROP EJECTING HEAD AND ITS MANUFACTURING PROCESS, INK CARTRIDGE, INKJET RECORDER, MICROPUMP, AND OPTICAL DEVICE

PROBLEM TO BE SOLVED: To solve a problem that characteristic variation is significant and reliability is insufficient. SOLUTION: Electrodes 24 are provided on a base substrate 21 while being divided by electrode dividing grooves 26 which are then filled with an insulating film 27 and flattened. Furt...

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Bibliographic Details
Main Authors KURODA TAKAHIKO, TANAKA MAKOTO, HASHIMOTO KENICHIRO, IRINODA MITSUGI, NISHIMURA MANABU, ABE SHUYA
Format Patent
LanguageEnglish
Published 02.04.2004
Edition7
Subjects
BLASTING
CORRECTION OF TYPOGRAPHICAL ERRORS
HEATING
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LIGHTING
LINING MACHINES
MECHANICAL ENGINEERING
PERFORMING OPERATIONS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PRINTING
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To solve a problem that characteristic variation is significant and reliability is insufficient. SOLUTION: Electrodes 24 are provided on a base substrate 21 while being divided by electrode dividing grooves 26 which are then filled with an insulating film 27 and flattened. Furthermore, a sacrifice layer is formed and after a diaphragm 22 is formed, the sacrifice layer is removed by etching to form a gap 23 thus constituting an actuator substrate 11. Surface of the actuator substrate 11 is formed flatly on the diaphragm 22 side. COPYRIGHT: (C)2004,JPO
Bibliography:Application Number: JP20020264243