ELECTROSTATIC ACTUATOR, LIQUID DROP EJECTING HEAD AND ITS MANUFACTURING PROCESS, INK CARTRIDGE, INKJET RECORDER, MICROPUMP, AND OPTICAL DEVICE

PROBLEM TO BE SOLVED: To solve a problem that characteristic variation is significant and reliability is insufficient. SOLUTION: Electrodes 24 are provided on a base substrate 21 while being divided by electrode dividing grooves 26 which are then filled with an insulating film 27 and flattened. Furt...

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Main Authors KURODA TAKAHIKO, TANAKA MAKOTO, HASHIMOTO KENICHIRO, IRINODA MITSUGI, NISHIMURA MANABU, ABE SHUYA
Format Patent
LanguageEnglish
Published 02.04.2004
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To solve a problem that characteristic variation is significant and reliability is insufficient. SOLUTION: Electrodes 24 are provided on a base substrate 21 while being divided by electrode dividing grooves 26 which are then filled with an insulating film 27 and flattened. Furthermore, a sacrifice layer is formed and after a diaphragm 22 is formed, the sacrifice layer is removed by etching to form a gap 23 thus constituting an actuator substrate 11. Surface of the actuator substrate 11 is formed flatly on the diaphragm 22 side. COPYRIGHT: (C)2004,JPO
Bibliography:Application Number: JP20020264243