SEMICONDUCTOR MEMORY DEVICE AND ITS MANUFACTURING METHOD

• Main Authors: NAKAMURA MANABU, SERA KENTARO, TAKAGI HIDEO, UTSUNO ITSUHIRO, AZUMA MASAHIKO, KAJITA TATSUYA, NANSEI HIROYUKI
• Format: Patent
• Language: English
• Published: 25.03.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor memory device in which a high quality multilayer insulating film such as an ON film or an ONO film is formed at low temperatures, and to provide its manufacturing method. SOLUTION: After forming a lower silicon oxide film 102 on a sili...