METHOD OF ACQUIRING PROCESS RESULT INTEGRATED PRIOR TO PROCESS TOOL TO BE PLACED

• Main Authors: HOON CHO NAM, WONG GEORGE, BENYON PETER, KONG LEONG CHEE, CHAM JOHNNY, EE NEOH SOON, SHU CHENG CHOR
• Format: Patent
• Language: English
• Published: 18.03.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; COUNTING; DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR

PROBLEM TO BE SOLVED: To confirm and guarantee a process result integrated prior to the placement of a process tool as a change or a part of renewal of a semiconductor manufacturing factory. SOLUTION: A complete semiconductor manufacturing supplemental matter of a process tool is subdivided into a short loop or a submodule. Later, they are combined into a complete loop. The combination of a submodule to a module which approaches a complete supplemental matter of the process tool is carried out in a mild method, and one or a plurality of subloops are first combined and evaluated. One or a plurality of additional subgroups are added to this combination, and each of these subgroups at the end is also formed by combining one or a plurality of (original) subgroups. This process is continued until the complete supplemental matter of a process device is formed and the complete process loop of a semiconductor device manufacturing factory is completed. COPYRIGHT: (C)2004,JPO