METHOD OF ACQUIRING PROCESS RESULT INTEGRATED PRIOR TO PROCESS TOOL TO BE PLACED
PROBLEM TO BE SOLVED: To confirm and guarantee a process result integrated prior to the placement of a process tool as a change or a part of renewal of a semiconductor manufacturing factory. SOLUTION: A complete semiconductor manufacturing supplemental matter of a process tool is subdivided into a s...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
18.03.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To confirm and guarantee a process result integrated prior to the placement of a process tool as a change or a part of renewal of a semiconductor manufacturing factory. SOLUTION: A complete semiconductor manufacturing supplemental matter of a process tool is subdivided into a short loop or a submodule. Later, they are combined into a complete loop. The combination of a submodule to a module which approaches a complete supplemental matter of the process tool is carried out in a mild method, and one or a plurality of subloops are first combined and evaluated. One or a plurality of additional subgroups are added to this combination, and each of these subgroups at the end is also formed by combining one or a plurality of (original) subgroups. This process is continued until the complete supplemental matter of a process device is formed and the complete process loop of a semiconductor device manufacturing factory is completed. COPYRIGHT: (C)2004,JPO |
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Bibliography: | Application Number: JP20030298125 |