VACUUM HEAT TREATMENT FURNACE

PROBLEM TO BE SOLVED: To sufficiently reduce the treatment unevenness of a treated object even when the flow velocity distribution of treatment gas in a furnace is uneven. SOLUTION: This vacuum heat treatment furnace for leading the treatment gas into the evacuated furnace to apply heat treatment to...

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Bibliographic Details
Main Authors HORI SATORU, INUZUKA SHINOBU, MIYAJIMA TAKASHI
Format Patent
LanguageEnglish
Published 18.03.2004
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To sufficiently reduce the treatment unevenness of a treated object even when the flow velocity distribution of treatment gas in a furnace is uneven. SOLUTION: This vacuum heat treatment furnace for leading the treatment gas into the evacuated furnace to apply heat treatment to the treated object is provided with a frame 61 placing the treated object M and vertically movable by a lifting rod 6 in the furnace. During heat treatment, the lifting rod 6 is vertically moved by a drive shaft 72 to periodically move the frame 61 up and down in a reaction chamber CR, and simultaneously the lifting rod 6 is rotated by a motor 64. COPYRIGHT: (C)2004,JPO
Bibliography:Application Number: JP20020248750