INSPECTION APPARATUS

• Main Authors: SUZUKI YASUYUKI, ISHIGURO TOMOHIRO
• Format: Patent
• Language: English
• Published: 26.02.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

PROBLEM TO BE SOLVED: To make an apparatus main body compact and to appropriately position an object to be inspected to an inspecting location. SOLUTION: By switching the direction of the object to be inspected 2 mounted onto a stage 7 for inspection by rotating a θ-stage 11 when the object 2 is gui...