INSPECTION APPARATUS

PROBLEM TO BE SOLVED: To make an apparatus main body compact and to appropriately position an object to be inspected to an inspecting location. SOLUTION: By switching the direction of the object to be inspected 2 mounted onto a stage 7 for inspection by rotating a θ-stage 11 when the object 2 is gui...

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Bibliographic Details
Main Authors SUZUKI YASUYUKI, ISHIGURO TOMOHIRO
Format Patent
LanguageEnglish
Published 26.02.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Summary:PROBLEM TO BE SOLVED: To make an apparatus main body compact and to appropriately position an object to be inspected to an inspecting location. SOLUTION: By switching the direction of the object to be inspected 2 mounted onto a stage 7 for inspection by rotating a θ-stage 11 when the object 2 is guided to the prescribed inspecting location, the amount of movement of an optical unit 8 in a horizontal direction by an X-stage 14 is reduced. By moving a Y-stage 12 by a very small amount in a horizontally direction to a mounting surface 7a, positioning error of the object 2 which has occurred due to the rotation of the θ-stage 11 is corrected to highly precisely position the object 2 at the prescribed inspecting location. COPYRIGHT: (C)2004,JPO
Bibliography:Application Number: JP20020218698