ALIGNER

• Main Authors: MIZUGUCHI YOSHIHIRO, SHIMA SHUICHI, IGUCHI TSUNEO
• Format: Patent
• Language: English
• Published: 19.02.2004
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; FREQUENCY-CHANGING; HOLOGRAPHY; MATERIALS THEREFOR; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PROBLEM TO BE SOLVED: To transfer a pattern with high resolution by reducing the influence of divergent lights included in incident lights from a light source in an aligner in a proximity system using a liquid crystal display element as a mask. SOLUTION: A microlens array 11 for forming an image magnified equally to an image formed by an opening 18 of each pixel of a liquid crystal display element 8 on the surface of a substrate 13 to be exposed is arranged between the liquid crystal element 8 and the substrate 13 to be exposed. Incident lights to the liquid crystal element 8 are transmitted through the opening 18 of the liquid crystal element 8, and transmitted through a microlens array 11 so as to be converged. An image magnified equally to an image formed by the opening 18 of the liquid crystal element 8 is imaged on the surface of the substrate 13 to be exposed. COPYRIGHT: (C)2004,JPO