MOVABLE BODY DRIVE DEVICE
PROBLEM TO BE SOLVED: To provide a linear drive device equipped with a non-contact type linear encoder in which no dust adheres to scale without spoiling advantages of a precise linear drive device in which sliding resistance is minimized by a linear motor and a hydrostatic air-cushion bearing. SOLU...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
05.02.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a linear drive device equipped with a non-contact type linear encoder in which no dust adheres to scale without spoiling advantages of a precise linear drive device in which sliding resistance is minimized by a linear motor and a hydrostatic air-cushion bearing. SOLUTION: A scale accommodating body (44) for accommodating a long scale (42) divided by tick marks and a read head (41) for detecting a position of the movable body by reading a tick mark of the scale without coming into contact with the scale, is mounted on the movable body and one supporting body. The scale accommodating body has a long hole (45) which enables insertion of the scale and one side of the reading head, and a feed port (46) for introducing compressed air. A scale cover for blocking the long hole of the scale accommodating body to which a minute clearance (48) is provided and forming an air vessel (49) is mounted on the movable body and the other supporting body. Air introduced from the feed port to the air vessel jets through the minute clearance so as to prevent the entry of dust. COPYRIGHT: (C)2004,JPO |
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Bibliography: | Application Number: JP20020198485 |