TARGET FOR GENERATING LIGHT HAVING EXTREMELY SHORT WAVELENGTH, LIGHT GENERATING METHOD USING TARGET, AND DEVICE THEREFOR

PROBLEM TO BE SOLVED: To provide a target having a high radiation conversion efficiency, a highly clean target, a generation method of light having an extremely short wavelength using the target, and a device therefor, without wasting much input laser light energy. SOLUTION: This generation device o...

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Bibliographic Details
Main Authors NAKATSUKA MASAHIRO, NORIMATSU TAKAYOSHI, MIYANAGA NORIAKI, NISHIHARA ISANAGA, NISHIMURA HIROAKI
Format Patent
LanguageEnglish
Published 05.02.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GAMMA RAY OR X-RAY MICROSCOPES
IRRADIATION DEVICES
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
SEMICONDUCTOR DEVICES
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
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Summary:PROBLEM TO BE SOLVED: To provide a target having a high radiation conversion efficiency, a highly clean target, a generation method of light having an extremely short wavelength using the target, and a device therefor, without wasting much input laser light energy. SOLUTION: This generation device of light having an extremely short wavelength is characterized by being equipped with a hopper 4 having a discharge port capable of discharging frost to one side, a refrigerator 1 for cooling the hopper to an extremely low temperature, a heater 3 capable of heating the wall face of the hopper intermittently, and a vacuum chamber 7 for keeping the periphery of the hopper vacuum, provided on one side with a first window 10 for guiding a laser beam from the outside to the periphery of an outlet, and on the other side with a second window 11 for taking out extreme ultraviolet rays. The light having an extremely short wavelength is generated by the generation device by using as the target the frost F having a density which is 1/100-1/2 of the solid density. COPYRIGHT: (C)2004,JPO
Bibliography:Application Number: JP20020197251