METHOD FOR PRODUCING HIGH PURITY SILICON NITRIDE FINE POWDER

PROBLEM TO BE SOLVED: To efficiently produce fine and high purity silicon nitride powder. SOLUTION: Silicon powder is fused or vaporized in plasma flame, and is thereafter subjected to nitriding, so that the high purity silicon nitride fine powder is produced. COPYRIGHT: (C)2004,JPO

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Bibliographic Details
Main Authors WATANABE SHOJIRO, OTSUKA TETSUMI
Format Patent
LanguageEnglish
Published 21.10.2003
Edition7
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Summary:PROBLEM TO BE SOLVED: To efficiently produce fine and high purity silicon nitride powder. SOLUTION: Silicon powder is fused or vaporized in plasma flame, and is thereafter subjected to nitriding, so that the high purity silicon nitride fine powder is produced. COPYRIGHT: (C)2004,JPO
Bibliography:Application Number: JP20020105134