APPARATUS FOR INSPECTING DEFECT IN LIGHT-SCATTERING TRANSMISSION SHEET

• Main Authors: OKAZAWA ATSUSHI, SOEDA MASAHIKO
• Format: Patent
• Language: English
• Published: 15.10.2003
• Edition: 7
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a defect-inspecting apparatus for speedily detecting both of foreign object defects and light-scattering defects at the light-scattering transmission sheet by one inspection with high sensitivity. SOLUTION: The defect-inspecting apparatus for inspecting the presence or absence of defects in the light-scattering transmission sheet to be transported comprises a line sensor camera for imaging from a direction that is nearly vertical to the surface of the scattering transmission sheet by rays that are scattered and transmitted through the scattering transmission sheet, at least one line-like light source that is provided at least at both the sides on the extension of the imaging light axis of the line sensor camera, and a strip of dimming member that is provided on the extension of the imaging light axis of the line sensor camera. COPYRIGHT: (C)2004,JPO