VACUUM ULTRAVIOLET-RAY GENERATING APPARATUS

• Main Authors: TAKAOKA EIKO, KATO KIYOSHI, YOSHIMURA MASASHI, MORI YUSUKE, SASAKI TAKATOMO
• Format: Patent
• Language: English
• Published: 02.10.2003
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; DEVICES USING STIMULATED EMISSION; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

PROBLEM TO BE SOLVED: To generate vacuum ultraviolet rays as stable output which is coherent, within a wavelength range of 0.208 to 0.174 μm. SOLUTION: An ND:YAG which performs laser oscillation with a wavelength of 1.064 μm and an Nd:YLF laser which performs laser oscillation with 1.047 and 1.053 μm are used as an exciting light source and an optical parametric oscillator such as an RTA is excited with their second higher harmonics (0.532 μm, 0.5235 μm, and 0.5265 μm); and second higher harmonic and sum frequency generation of the optical parametric oscillator is performed to perform wavelength conversion into ultraviolet rays of 0.266 to 0.208 μm. The sum frequency generation of the obtained ultraviolet rays of 0.266 to 0.208 μm with basic waves (1.064 μm, 1.047 μm and 1.053 μm) of the Nd:YAG laser and Nd:YLF laser as the exciting light source is performed by using KAB crystal again to provide a vacuum ultraviolet-ray generating apparatus whose output is coherent and stable within the wavelength of 0.208 to 0.174 μm. COPYRIGHT: (C)2004,JPO