CLASSIFICATION APPARATUS AND MANUFACTURING METHOD FOR SUBSTRATE FOR ELECTRONIC DEVICE

• Main Author: TOCHIHARA YASUTAKA
• Format: Patent
• Language: English
• Published: 24.09.2003
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTROGRAPHY; HOLOGRAPHY; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MATERIALS THEREFOR; METAL-WORKING NOT OTHERWISE PROVIDED FOR; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; POSTAL SORTING; SEPARATING SOLIDS FROM SOLIDS; SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTEDPIECE-MEAL, e.g. BY PICKING; TRANSPORTING

PROBLEM TO BE SOLVED: To effectively put a batch treatment type grinder to practical use in grinding the surface of a work requiring high flatness and smoothness like a glass substrate for an electronic device used in a photomask blank. SOLUTION: When a cassette K in which a plurality of works W having various thicknesses are housed is supplied to a loader charging part 21, each of the works W is obtained from the cassette K by the cooperation with a transfer device 5 or a robot hand 6 to be transferred to a plate thickness measuring part 11. The thickness of each work W is automatically measured contactlessly by an electrostatic capacity type sensor in the plate thickness measuring part 11. A control part not shown in Fig. controls the transfer device 5 or the robot hand 6 so as to classify the work W by thickness on the basis of the measuring result of the plate thickness measuring part 11 to store the same in the cassette K preliminarily arranged to an unloader part 3. COPYRIGHT: (C)2003,JPO