MANUFACTURING METHOD FOR QUARTZ RESONATOR

PROBLEM TO BE SOLVED: To manufacture a micro-quartz resonator from a thin plate quartz substrate at a low cost, very consistently and at high accuracy using photolithographic technology and chemical etching technology. SOLUTION: A metal film, formed on the thin plate quartz substrate 1 by cutting ou...

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Bibliographic Details
Main Author KIZAKI SHIGERU
Format Patent
LanguageEnglish
Published 15.08.2003
Edition7
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:PROBLEM TO BE SOLVED: To manufacture a micro-quartz resonator from a thin plate quartz substrate at a low cost, very consistently and at high accuracy using photolithographic technology and chemical etching technology. SOLUTION: A metal film, formed on the thin plate quartz substrate 1 by cutting out of a quartz original stone at a prescribed angle and polishing it to a prescribed thickness, is a single-layer metal film 2 of chromium with a thickness of 500 to 3,000 . The metal film of Figure 1 (a) is formed, and the number of the etching process, material cost and the like of the metal films of Figure 1 (b), (e) and (h) are reduced. A laminate film, consisting of nickel and gold, is used for an electrode film. COPYRIGHT: (C)2003,JPO
Bibliography:Application Number: JP20020064525