METHOD FOR MANUFACTURING MICRO LENS ARRAY, ELECTROLYTE AND MANUFACTURING APPARATUS FOR USE IN THIS METHOD

• Main Authors: AKUTSU HIDEKAZU, TANIDA KAZUTOSHI, SHIMIZU TAKASHI, OTSU SHIGEMI
• Format: Patent
• Language: English
• Published: 30.07.2003
• Edition: 7
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; APPARATUS THEREFOR; CHEMISTRY; ELECTROFORMING; ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; METALLURGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS; PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

PROBLEM TO BE SOLVED: To provide a method for manufacturing a micro lens array by which the micro lens array is manufactured at low costs by a simple method and the degree of integration and the refractive index of the micro lens array are freely controlled, and an electrolyte and a manufacturing apparatus for use in this method. SOLUTION: The method for manufacturing the micro lens array comprises a stage in which a substrate for manufacturing the micro lens array, which has a conductive thin film and an optical semiconductor thin film laminated in order on an insulating substrate, is arranged in a water-based electrolyte containing a film forming material of which the dissolubility or the dispersibility to an aqueous solution is reduced by the change of pH in a state where at least the optical semiconductor thin film is brought into contact with the electrolyte, and in such a state, a voltage is applied between a selected area of the optical semiconductor thin film and a counter electrode by radiating the selected area of the optical semiconductor thin film with light and then the material is precipitated on the selected area of the optical semiconductor thin film to form a micro lens array layer. COPYRIGHT: (C)2003,JPO