METHOD FOR MANUFACTURING MICRO LENS ARRAY, ELECTROLYTE AND MANUFACTURING APPARATUS FOR USE IN THIS METHOD

PROBLEM TO BE SOLVED: To provide a method for manufacturing a micro lens array by which the micro lens array is manufactured at low costs by a simple method and the degree of integration and the refractive index of the micro lens array are freely controlled, and an electrolyte and a manufacturing ap...

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Bibliographic Details
Main Authors AKUTSU HIDEKAZU, TANIDA KAZUTOSHI, SHIMIZU TAKASHI, OTSU SHIGEMI
Format Patent
LanguageEnglish
Published 30.07.2003
Edition7
Subjects
AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
APPARATUS THEREFOR
CHEMISTRY
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
METALLURGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE
SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR
SHAPING OR JOINING OF PLASTICS
TRANSPORTING
WORKING OF PLASTICS
WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Summary:PROBLEM TO BE SOLVED: To provide a method for manufacturing a micro lens array by which the micro lens array is manufactured at low costs by a simple method and the degree of integration and the refractive index of the micro lens array are freely controlled, and an electrolyte and a manufacturing apparatus for use in this method. SOLUTION: The method for manufacturing the micro lens array comprises a stage in which a substrate for manufacturing the micro lens array, which has a conductive thin film and an optical semiconductor thin film laminated in order on an insulating substrate, is arranged in a water-based electrolyte containing a film forming material of which the dissolubility or the dispersibility to an aqueous solution is reduced by the change of pH in a state where at least the optical semiconductor thin film is brought into contact with the electrolyte, and in such a state, a voltage is applied between a selected area of the optical semiconductor thin film and a counter electrode by radiating the selected area of the optical semiconductor thin film with light and then the material is precipitated on the selected area of the optical semiconductor thin film to form a micro lens array layer. COPYRIGHT: (C)2003,JPO
Bibliography:Application Number: JP20020018746