SOLID-STATE IMAGING DEVICE AND METHOD OF PREVENTING SMEAR THEREOF

• Main Author: OKI HIROAKI
• Format: Patent
• Language: English
• Published: 25.07.2003
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PICTORIAL COMMUNICATION, e.g. TELEVISION; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To suppress a smear component in an image pickup element. SOLUTION: The inner edge of an opening 202 of a light shielding film 200 is contacted directly with a p+ type light receiving film 112 of a photosensor 110 to establish an electric contact. A smear component depends on an irregular reflection component between the light shielding film 200 and a silicon substrate 50, and the irregular reflection component results from the intervention of an insulating film 180 between the light shielding film 200 and substrate 50. Thus, by removing the light shielding film 200 and the insulating film 180 of the photosensor 110 from the p+ type light receiving film 112, the irregular reflection component is cut off and smear component is suppressed. Further, by applying a plus voltage to the light shielding film 200, a potential on the side of the photosensor 110 is relatively deepened and parts of a bulk component present on the side of the substrate are collected, whereby the bulk and smear components are suppressed. COPYRIGHT: (C)2003,JPO