APPARATUS FOR PRODUCING PRECIPITATED SUBSTRATE

• Main Authors: TADOKORO MASAHIRO, NAKAI YASUHIRO, TSUDA MASANORI, OKUNO ATSUSHI, NAKAJIMA YOSHITO
• Format: Patent
• Language: English
• Published: 15.07.2003
• Edition: 7
• Subjects: CASTING; CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES; PERFORMING OPERATIONS; POWDER METALLURGY; TRANSPORTING

PROBLEM TO BE SOLVED: To simply realize prevention of overheat in a precipitating mechanism 10 caused by direct irradiation with radiation heat at low cost. SOLUTION: An apparatus for producing a precipitated substrate is the one, in which a material 101 to be melted is made to molten material 15 in an upper side holding chamber 6 and a lower side holding chamber 7, and after solidifying and growing the material 101 to be melted on the surface 14a of a base board 14 for precipitation, this material is tore off from the base board surface 14a to produce a sheet-like semi-conductor substrate. This apparatus is provided with a crucible device 51 for holding while heating so as to make the material 101 to be melted to the molten material 15, the precipitating mechanism 10 for pulling up after dipping the substrate 14 for precipitation into the molten material 15, and a first heat shut-off body 78 disposed at between the precipitating mechanism 10 and the crucible device 51 and formed so as to shut off the radiation heat toward the precipitating mechanism 10 from the molten material 15 in the crucible device 51. COPYRIGHT: (C)2003,JPO