METHOD OF POLISHING INNER FACE OF STAINLESS PIPE

• Main Authors: MASUDA YASUHIKO, HAYAKAWA JUICHI, SHINPO YOSHINORI, SAITO KOICHI
• Format: Patent
• Language: English
• Published: 24.06.2003
• Edition: 7
• Subjects: CLEANING; CLEANING IN GENERAL; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; PREVENTION OF FOULING IN GENERAL; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a method for removing chemically and completely residual iron powder and rust generated in polishing and left after the polishing, without roughening a pipe surface, when polishing an inner face of a stainless steel pipe for a semiconductor device by a magnetic force beam, in particular, when polishing the inner face of flexible one. SOLUTION: In this method for polishing the stainless steel pipe by magnetic force beam work, and for removing chemically the residual iron powder and rust generated in the polishing and left after the polishing, a passivated film is formed at first by conducting washing by a weak acid solution non-corrosive on stainless steel, and washing using a strong acid is carried out thereafter to dissolve completely the residual iron powder and rust. The polishing of the stainless steel pipe by the magnetic force beam work is the polishing of the inner face for the flexible pipe, the weak acid solution non-corrosive on the stainless steel used at first is nitric acid solution, and the strong acid used thereafter to dissolve completely the residual iron powder and rust is Stain-Pet (R) solution. COPYRIGHT: (C)2003,JPO