THIN FILM PIEZOELECTRIC RESONATOR AND ITS MANUFACTURING METHOD

• Main Authors: SANO KENYA, YASUMOTO YASUAKI, KAWAKUBO TAKASHI, SHIMIZU TATSUO, YANASE NAOKO, OHARA RYOICHI, ABE KAZUHIDE
• Format: Patent
• Language: English
• Published: 06.06.2003
• Edition: 7
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

PROBLEM TO BE SOLVED: To provide a thin film piezoelectric resonator and its manufacturing method, the resonator having a large electro-mechanical coupling coefficient and a compact device size capable of being easily manufactured. SOLUTION: The thin film piezoelectric resonator is provided with a s...