THIN FILM PIEZOELECTRIC RESONATOR AND ITS MANUFACTURING METHOD
PROBLEM TO BE SOLVED: To provide a thin film piezoelectric resonator and its manufacturing method, the resonator having a large electro-mechanical coupling coefficient and a compact device size capable of being easily manufactured. SOLUTION: The thin film piezoelectric resonator is provided with a s...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
06.06.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Abstract | PROBLEM TO BE SOLVED: To provide a thin film piezoelectric resonator and its manufacturing method, the resonator having a large electro-mechanical coupling coefficient and a compact device size capable of being easily manufactured. SOLUTION: The thin film piezoelectric resonator is provided with a single crystal substrate (1), and a resonator (8) composed of a lower electrode (4), a ferroelectric layer (59, and an upper electrode (6) collectively laminated on the single crystal substrate across an air gap (V), wherein each of the lower electrode and the ferroelectric layer constituting the resonator has an epitaxial growth relationship with respect to the single crystal substrate, and the resonator is supported on the single crystal substrate through the air gap by the ferroelectric layer extended around the single crystal substrate. COPYRIGHT: (C)2003,JPO |
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AbstractList | PROBLEM TO BE SOLVED: To provide a thin film piezoelectric resonator and its manufacturing method, the resonator having a large electro-mechanical coupling coefficient and a compact device size capable of being easily manufactured. SOLUTION: The thin film piezoelectric resonator is provided with a single crystal substrate (1), and a resonator (8) composed of a lower electrode (4), a ferroelectric layer (59, and an upper electrode (6) collectively laminated on the single crystal substrate across an air gap (V), wherein each of the lower electrode and the ferroelectric layer constituting the resonator has an epitaxial growth relationship with respect to the single crystal substrate, and the resonator is supported on the single crystal substrate through the air gap by the ferroelectric layer extended around the single crystal substrate. COPYRIGHT: (C)2003,JPO |
Author | KAWAKUBO TAKASHI ABE KAZUHIDE YANASE NAOKO OHARA RYOICHI SHIMIZU TATSUO YASUMOTO YASUAKI SANO KENYA |
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Snippet | PROBLEM TO BE SOLVED: To provide a thin film piezoelectric resonator and its manufacturing method, the resonator having a large electro-mechanical coupling... |
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SubjectTerms | BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS |
Title | THIN FILM PIEZOELECTRIC RESONATOR AND ITS MANUFACTURING METHOD |
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