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Summary:PROBLEM TO BE SOLVED: To provide a method which is capable of repeatedly and efficiently recycling such a cleaning fluid containing organic matter as is obtained at the time of cleaning an object to be cleaned, to which a liquid or solid organic matter adheres, with a cleaning fluid in such a way that the cleaning fluid can be prevented profitably from the emulsification when phase-separating the organic matter from the cleaning fluid containing the above organic matter. SOLUTION: This method comprises the steps of immersion-treating the object to be cleaned under a state that a specific cleaning fluid phase-separable in dependance of the fluid temperature is separated by heating into two phases, of consequently dissolving and removing the organic matter adhering to the object, and of thereafter cooling the recovered cleaning fluid to thereby separate and remove the above organic matter present in the above cleaning fluid, and is characterized in that an emulsion breaker is made to exist in the above recovered cleaning fluid. COPYRIGHT: (C)2003,JPO
Bibliography:Application Number: JP20010359722