MASS FLUID FLOW SENSOR, AND FLUID FLOW DETECTOR
PROBLEM TO BE SOLVED: To directly detect a fluid in a conduit, to accurately measure a fluid flow rate in quick sensitivity, and to prevent detection ability of a sensor from lowering by latent heat of an electric insulator that is a support. SOLUTION: Each of this mass fluid flow sensor and mass fl...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
23.04.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To directly detect a fluid in a conduit, to accurately measure a fluid flow rate in quick sensitivity, and to prevent detection ability of a sensor from lowering by latent heat of an electric insulator that is a support. SOLUTION: Each of this mass fluid flow sensor and mass fluid flow detector of the present invention is formed into structure processed with electrodes 5 5' onto a hybrid ceramic of composite structure having an interface 4 partitioning a positive temperature coefficient thermistor 2 and a supporting table 3 of an insulator, and mounted with an insulation coating and heat- conductive metal, or housed therewith, and an outside of the thermistor 2 is insulated by the supporting table 3 of the insulator to arrange, inside the conduit, the resistor thermistor 2 having the high positive temperature coefficient and of which the heating temperature is self-restrictive. |
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Bibliography: | Application Number: JP20010297789 |