STACKED CAPACITOR AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To prevent oxygen that oxidizes a barrier layer or a contact plug from being diffused. SOLUTION: A stacked capacitor comprises a cylindrical conductive layer 118 having an opening 120 as a lower electrode thereof, a second barrier layer 116 provided in the opening 120 of the la...

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Bibliographic Details
Main Authors KIYOTOSHI MASAHIRO, SHU SOMEI, FUKUDA MASATOSHI, SUZUKI HISAYA, YANG MINIEH
Format Patent
LanguageEnglish
Published 04.04.2003
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To prevent oxygen that oxidizes a barrier layer or a contact plug from being diffused. SOLUTION: A stacked capacitor comprises a cylindrical conductive layer 118 having an opening 120 as a lower electrode thereof, a second barrier layer 116 provided in the opening 120 of the layer 118 to fill a part of the opening 120, a capacitor dielectric layer 122 provided on the layer 118 and the layer 116, and an upper electrode layer 124 provided on the layer 122.
Bibliography:Application Number: JP20020150644