STACKED CAPACITOR AND ITS MANUFACTURING METHOD
PROBLEM TO BE SOLVED: To prevent oxygen that oxidizes a barrier layer or a contact plug from being diffused. SOLUTION: A stacked capacitor comprises a cylindrical conductive layer 118 having an opening 120 as a lower electrode thereof, a second barrier layer 116 provided in the opening 120 of the la...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
04.04.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To prevent oxygen that oxidizes a barrier layer or a contact plug from being diffused. SOLUTION: A stacked capacitor comprises a cylindrical conductive layer 118 having an opening 120 as a lower electrode thereof, a second barrier layer 116 provided in the opening 120 of the layer 118 to fill a part of the opening 120, a capacitor dielectric layer 122 provided on the layer 118 and the layer 116, and an upper electrode layer 124 provided on the layer 122. |
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Bibliography: | Application Number: JP20020150644 |