LIGHT IRRADIATION DEVICE

PROBLEM TO BE SOLVED: To provide a light irradiation device capable of certainly treating an object to be treated by suppressing the temperature rise of a window member for taking out the excimer light of a lamp house having a dielectric barrier discharge lamp housed therein and capable of preventin...

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Bibliographic Details
Main Authors FUSHITSUGU HIDEKI, KIYOSE MASAHIDE, SUGAWARA HIROSHI, HISHINUMA NOBUYOSHI
Format Patent
LanguageEnglish
Published 18.03.2003
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
CLEANING
CLEANING IN GENERAL
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
PREVENTION OF FOULING IN GENERAL
THEIR RELEVANT APPARATUS
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a light irradiation device capable of certainly treating an object to be treated by suppressing the temperature rise of a window member for taking out the excimer light of a lamp house having a dielectric barrier discharge lamp housed therein and capable of preventing the adhesion of a pollutant to the window member. SOLUTION: The light irradiation device is equipped with the dielectric barrier discharge lamp 2 and the lamp house 1 housing the dielectric barrier discharge lamp 2 and having the window member 5 for taking out excimer light formed thereto and operated in such a state that the lamp house is substituted with an inert gas. An inert gas jet mechanism 6 is provided in the lamp house 1 and the inert gas ejected from the inert gas jet mechanism 6 is directly sprayed on the window member 5.
Bibliography:Application Number: JP20010279747